
Perfluoroelastomers are a type of synthetic rubber having even greater heat
and chemical resistance than the fluoroelastomers. Perfluoroelastomers are
widely used as seals on semiconductor wafer processing equipment. This type
of rubber can be used in extreme conditions up to temperatures around 300
degree celcius or even higher under special compounding. The basic
disadvantages of this rubber are difficult processing, very high cost, poor
physical properties at high temperature, and their high glass transition
temperatures which limit their use at low temperatures. Most materials
cannot be used below zero degree celsius, and even at normal temperatures
their creep properties are likely to be poor.
The commercial application of perfluoroelastomer started in the 1960s. From
this early beginning the use of perfluoroelastomers has increased steadily
over the years. Today Perfluoroelastomer seals are manufactured by a number
of companies worldwide.
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Properties of Perfluoroelastomers (FFKM)
- This rubber has extraordinary resistance to harsh chemicals and heat.
- They are enable to withstand virtually any process media, including
reactive plasmas, at temperatures as high as 327°C.
- In plasma and chemical vapor deposition applications,
perfluoroelastomers can withstand long term exposure in etching,
stripping and cleaning processes.
- In wet chemical operations, swelling due to prolonged chemical
exposure and poor elastic recovery are frequent causes of seal failure.
These inadequacies are eliminated in perfluoroelastomers.
- The reliability of seals made from perfluoroelastomers leads to
reduced wafer yield losses and lowered frequency of maintenance and
operations disruptions.
To get a better idea on Fluroelastomers, check out our articles
FKM (Fluoroelastomers)
for sealing
FFKM Performance and Application
Other Types of Synthetic Rubber